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Kazuhisa Ishii
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Miyagi, JP
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last 30 patents
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Patent Grant
Plasma treatment method and plasma treatment device
Patent number
9,165,764
Issue date
Oct 20, 2015
Tokyo Electron Limited
Masaki Inoue
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE
Publication number
20140329390
Publication date
Nov 6, 2014
TOKYO ELECTRON LIMITED
Masaki Inoue
H01 - BASIC ELECTRIC ELEMENTS