Kazuhisa Manabe

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Ehime, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 9,117,627
- Issue date Aug 25, 2015
- Sumitomo Heavy Industries Technology Co., Ltd.
- Kazuhisa Manabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20150064887
- Publication date Mar 5, 2015
- SEN Corporation
- Kazuhisa Manabe
- H01 - BASIC ELECTRIC ELEMENTS