Kazuhisa Matsumoto

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Koshi-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of substrate processing, substrate processing system, and st...
- Patent number 8,439,051
- Issue date May 14, 2013
- Tokyo Electron Limited
- Kazuhisa Matsumoto
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Liquid processing apparatus, liquid processing method, and recordin...
- Patent number 8,425,686
- Issue date Apr 23, 2013
- Tokyo Electron Limited
- Kazuhisa Matsumoto
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus
- Patent number 7,998,308
- Issue date Aug 16, 2011
- Tokyo Electron Limited
- Satoshi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing system
- Patent number 7,849,864
- Issue date Dec 14, 2010
- Tokyo Electron Limited
- Kazuhisa Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus
- Patent number 7,793,610
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder, and system and method for cleaning and drying same
- Patent number 6,158,596
- Issue date Dec 12, 2000
- Tokyo Electron Limited
- Hiromi Ohtsuka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND RECORDIN...
- Publication number 20110023912
- Publication date Feb 3, 2011
- TOKYO ELECTRON LIMITED
- Kazuhisa MATSUMOTO
- B08 - CLEANING
Information Patent Application
Liquid processing system
- Publication number 20080023049
- Publication date Jan 31, 2008
- TOKYO ELECTRON LIMITED
- Kazuhisa Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus
- Publication number 20070240638
- Publication date Oct 18, 2007
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus
- Publication number 20070240824
- Publication date Oct 18, 2007
- TOKYO ELECTRON LIMITED
- Satoshi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS