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Kazuhito Ikeda
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,875,280
Issue date
Apr 5, 2005
Hitachi Kokusai Electric Inc.
Kazuhito Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Treatment object conveyor apparatus, semiconductor manufacturing ap...
Patent number
6,190,104
Issue date
Feb 20, 2001
Kokusai Electric Co., Ltd.
Kazuhito Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transferring mechanism
Patent number
6,143,083
Issue date
Nov 7, 2000
Kokusai Electric Co., Ltd.
Shuji Yonemitsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus with a processing chamber, transfer...
Patent number
6,066,210
Issue date
May 23, 2000
Kokusai Electric Co., Ltd.
Shuji Yonemitsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
5,788,447
Issue date
Aug 4, 1998
Kokusai Electric Co., Ltd.
Shuji Yonemitsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal treatment furnace in a system for manufacturing semiconductors
Patent number
5,632,820
Issue date
May 27, 1997
Kokusai Electric Co., Ltd.
Tomoshi Taniyama
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20060075972
Publication date
Apr 13, 2006
Hitachi Kokusai Electric Inc.
Seiyo Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20020017363
Publication date
Feb 14, 2002
Seiyo Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20010025600
Publication date
Oct 4, 2001
Kazuhito Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...