Kazuhito MIYATA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method and substrate processing system
- Patent number 11,784,054
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and apparatus
- Patent number 11,594,417
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Kazuhito Miyata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Etching Method And Substrate Processing System
- Publication number 20210082710
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND APPARATUS
- Publication number 20200395219
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Kazuhito MIYATA
- H01 - BASIC ELECTRIC ELEMENTS