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Kazuhito Nakamura

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  • Nagoya-shi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD OF FORMING TASIN FILM
    • Publication number 20090197410
    • Publication date Aug 6, 2009
    • TOKYO ELECTRON LIMITED
    • Kazuhito Nakamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method of Film Deposition and Film Deposition System
    • Publication number 20090142491
    • Publication date Jun 4, 2009
    • Kazuhito Nakamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR TREATING SUBSTRATE AND RECORDING MEDIUM
    • Publication number 20090117270
    • Publication date May 7, 2009
    • TOKYO ELECTRON LIMITED
    • Hideaki Yamasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for cleaning substrate processing chamber
    • Publication number 20060124151
    • Publication date Jun 15, 2006
    • TOKYO ELECTRON LIMITED
    • Hideaki Yamasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CVD tantalum compounds for FET gate electrodes
    • Publication number 20050250318
    • Publication date Nov 10, 2005
    • Vijay Narayanan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method of forming a tantalum-containing gate electrode structure
    • Publication number 20050227441
    • Publication date Oct 13, 2005
    • TOKYO ELECTRON LIMITED
    • Kazuhito Nakamura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method for processing a substrate
    • Publication number 20050221002
    • Publication date Oct 6, 2005
    • TOKYO ELECTRON LIMITED
    • Kazuhito Nakamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CVD tantalum compounds for FET get electrodes
    • Publication number 20050104142
    • Publication date May 19, 2005
    • Vijav Narayanan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CVD process capable of reducing incubation time
    • Publication number 20040025789
    • Publication date Feb 12, 2004
    • TOKYO ELECTRON LIMITED
    • Hideaki Yamasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...