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Kazuhito Outsuka
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Power monitoring unit, control method therefor, and exposure apparatus
Patent number
6,909,372
Issue date
Jun 21, 2005
Canon Kabushiki Kaisha
Takehiko Iwanaga
G01 - MEASURING TESTING
Information
Patent Grant
Exposure method and apparatus, and device manufacturing method usin...
Patent number
6,714,691
Issue date
Mar 30, 2004
Canon Kabushiki Kaisha
Kazuhito Outsuka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
6,608,667
Issue date
Aug 19, 2003
Canon Kabushiki Kaisha
Hiroyuki Koide
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus including an optical characteristic d...
Patent number
5,925,887
Issue date
Jul 20, 1999
Canon Kabushiki Kaisha
Fumio Sakai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus
Patent number
4,814,829
Issue date
Mar 21, 1989
Canon Kabushiki Kaisha
Masao Kosugi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Power monitoring unit, control method therefor, and exposure apparatus
Publication number
20040056665
Publication date
Mar 25, 2004
Canon Kabushiki Kaisha
Takehiko Iwanaga
G01 - MEASURING TESTING
Information
Patent Application
EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD USIN...
Publication number
20030048960
Publication date
Mar 13, 2003
KAZUHITO OUTSUKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and device manufacturing method
Publication number
20010024269
Publication date
Sep 27, 2001
Hiroyuki Koide
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY