Kazuhito Saito

Person

  • Takaoka-shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus

    • Patent number 10,998,210
    • Issue date May 4, 2021
    • Kokusai Electric Corporation
    • Kazuhito Saito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus

    • Patent number 8,321,046
    • Issue date Nov 27, 2012
    • Hitachi Kokusai Electric Inc.
    • Masako Sueyoshi
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Substrate processing apparatus

    • Patent number 8,014,887
    • Issue date Sep 6, 2011
    • Hitachi Kokusai Electric Inc.
    • Masako Sueyoshi
    • G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents