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Kazuhito Saito
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Takaoka-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
10,998,210
Issue date
May 4, 2021
Kokusai Electric Corporation
Kazuhito Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
8,321,046
Issue date
Nov 27, 2012
Hitachi Kokusai Electric Inc.
Masako Sueyoshi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing apparatus
Patent number
8,014,887
Issue date
Sep 6, 2011
Hitachi Kokusai Electric Inc.
Masako Sueyoshi
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230093324
Publication date
Mar 23, 2023
Kokusai Electric Corporation
Keita OKUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, A NON-TRANSITORY COMPUTER-READABLE...
Publication number
20200216961
Publication date
Jul 9, 2020
Kokusai Electric Corporation
Makoto NOMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20190013223
Publication date
Jan 10, 2019
Kokusai Electric Corporation
Kazuhito SAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
Publication number
20170011974
Publication date
Jan 12, 2017
Hitachi Kokusai Electric Inc.
Takashi YOKAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing apparatus
Publication number
20110202162
Publication date
Aug 18, 2011
Hitachi Kokusai Electric Inc.
Masako Sueyoshi
G05 - CONTROLLING REGULATING
Information
Patent Application
Substrate Processing Apparatus
Publication number
20090024238
Publication date
Jan 22, 2009
Hitachi Kokusai Electric Inc.
Masako Sueyoshi
G05 - CONTROLLING REGULATING