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Kazuhito Suzuki
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Hyogo, JP
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last 30 patents
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Patent Grant
Photomask, manufacturing method thereof, and semiconductor device
Patent number
6,340,543
Issue date
Jan 22, 2002
Mitsubishi Denki Kabushiki Kaisha
Yoshikazu Nagamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY