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Kazuhito Takanashi
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Kanagawa, JP
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last 30 patents
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Patent Grant
Substrate manufacturing method and substrate processing apparatus
Patent number
7,256,104
Issue date
Aug 14, 2007
Canon Kabushiki Kaisha
Masataka Ito
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20070190746
Publication date
Aug 16, 2007
Canon Kabushiki Kaisha
Masataka Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate manufacturing method and substrate processing apparatus
Publication number
20040259328
Publication date
Dec 23, 2004
Canon Kabushiki Kaisha
Masataka Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching method
Publication number
20040169011
Publication date
Sep 2, 2004
Canon Kabushiki Kaisha
Kazuhito Takanashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Processing apparatus for processing substrate by process solution
Publication number
20040152319
Publication date
Aug 5, 2004
Canon Kabushiki Kaisha
Kenji Yamagata
C30 - CRYSTAL GROWTH
Information
Patent Application
Processing apparatus
Publication number
20040124088
Publication date
Jul 1, 2004
Canon Kabushiki Kaisha
Takashi Tsuboi
C30 - CRYSTAL GROWTH