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Kazuhito Tohnoe

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching method
    • Patent number 8,975,188
    • Issue date Mar 10, 2015
    • Tokyo Electron Limited
    • Yusuke Hirayama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching method
    • Patent number 8,975,191
    • Issue date Mar 10, 2015
    • Tokyo Electron Limited
    • Kazuhito Tohnoe
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SEMICONDUCTOR DEVICE MANUFACTURING METHOD
    • Publication number 20140227876
    • Publication date Aug 14, 2014
    • TOKYO ELECTRON LIMITED
    • Kazuhito Tohnoe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20140134846
    • Publication date May 15, 2014
    • Yusuke Hirayama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20140045338
    • Publication date Feb 13, 2014
    • TOKYO ELECTRON LIMITED
    • Kazuhito Tohnoe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR MODIFYING METAL CAP LAYERS IN SEMICONDUCTOR DEVICES
    • Publication number 20120252210
    • Publication date Oct 4, 2012
    • TOKYO ELECTRON LIMITED
    • Kazuhito Tohnoe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...