Kazuho Sone

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Chiba, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thin film forming apparatus and process for forming thin film using...
- Patent number 6,451,184
- Issue date Sep 17, 2002
- Canon Kabushiki Kaisha
- Kazuho Sone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming apparatus and method of forming thin film of comp...
- Patent number 6,238,527
- Issue date May 29, 2001
- Canon Kabushiki Kaisha
- Kazuho Sone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering apparatus and process for forming thin film usi...
- Patent number 6,200,431
- Issue date Mar 13, 2001
- Canon Kabushiki Kaisha
- Kazuho Sone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...