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Kazuichi Hayashi

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Semiconductor device manufacturing method and target substrate proc...
    • Patent number 8,310,054
    • Issue date Nov 13, 2012
    • Tokyo Electron Limited
    • Hidenori Miyoshi
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Processing device, electrode, electrode plate, and processing method
    • Patent number 8,038,835
    • Issue date Oct 18, 2011
    • Tokyo Electron Limited
    • Kazuichi Hayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Semiconductor device manufacturing method and target substrate proc...
    • Patent number 8,003,535
    • Issue date Aug 23, 2011
    • Tokyo Electron Limited
    • Hidenori Miyoshi
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Processing apparatus
    • Patent number 6,368,450
    • Issue date Apr 9, 2002
    • Tokyo Electron Limited
    • Kazuichi Hayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 6,253,029
    • Issue date Jun 26, 2001
    • Tokyo Electron Limited
    • Kazuichi Hayashi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Trap apparatus
    • Patent number 6,156,107
    • Issue date Dec 5, 2000
    • Tokyo Electron Limited
    • Kazuichi Hayashi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Film forming apparatus and method
    • Patent number 6,149,729
    • Issue date Nov 21, 2000
    • Tokyo Electron Limited
    • Teruo Iwata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for depositing a titanium film
    • Patent number 5,942,282
    • Issue date Aug 24, 1999
    • Tokyo Electron Limited
    • Kunihiro Tada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Trap apparatus
    • Patent number 5,904,757
    • Issue date May 18, 1999
    • Tokyo Electron Limited
    • Kazuichi Hayashi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Vacuum pump with gas heating
    • Patent number 5,879,139
    • Issue date Mar 9, 1999
    • Tokyo Electron Limited
    • Kazuichi Hayashi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Patents Applicationslast 30 patents