Kazuki Amemiya

Follow

Person

Tokyo, JP

People

Patents Applicationslast 30 patents

Information Patent Application
MICROSTRUCTURE INSPECTING APPARATUS, MICROSTRUCTURE INSPECTING METH...
- Publication number 20090095095
- Publication date Apr 16, 2009
- TOKYO ELECTRON LIMITED
- Masato Hayashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY