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Kazuki DEMPOH
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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Film forming apparatus
Patent number
12,027,344
Issue date
Jul 2, 2024
Tokyo Electron Limited
Shinya Iwashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming apparatus
Patent number
11,208,724
Issue date
Dec 28, 2021
Tokyo Electron Limited
Kazuki Dempoh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and gas injection member used therefor
Patent number
11,069,512
Issue date
Jul 20, 2021
Tokyo Electron Limited
Shinya Okabe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PARTICLE SUPPRESSION METHOD
Publication number
20230124029
Publication date
Apr 20, 2023
TOKYO ELECTRON LIMITED
Kazuki DEMPOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20230051432
Publication date
Feb 16, 2023
TOKYO ELECTRON LIMITED
Shinya IWASHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
Publication number
20230035284
Publication date
Feb 2, 2023
Tokyo Electron Limited
Kazuki DEMPOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20190385815
Publication date
Dec 19, 2019
TOKYO ELECTRON LIMITED
Shinya IWASHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20180327904
Publication date
Nov 15, 2018
TOKYO ELECTRON LIMITED
Kazuki DEMPOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND GAS INJECTION MEMBER USED THEREFOR
Publication number
20180047541
Publication date
Feb 15, 2018
Shinya OKABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...