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Kazuki HASHIMOTO
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Nirasaki City, JP
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last 30 patents
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Patent Grant
Method, device, and system for etching silicon oxide film
Patent number
11,626,290
Issue date
Apr 11, 2023
Tokyo Electron Limited
Osamu Yokoyama
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD, DEVICE, AND SYSTEM FOR ETCHING SILICON OXIDE FILM
Publication number
20220051901
Publication date
Feb 17, 2022
TOKYO ELECTRON LIMITED
Osamu YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE AND CMOS TRANSISTOR
Publication number
20190123165
Publication date
Apr 25, 2019
TOKYO ELECTRON LIMITED
Koji AKIYAMA
H01 - BASIC ELECTRIC ELEMENTS