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Kazuki Kosai
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Beaverton, OR, US
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last 30 patents
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Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
Patent number
8,475,668
Issue date
Jul 2, 2013
Tokyo Electron Limited
Hiroshi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
Patent number
8,303,723
Issue date
Nov 6, 2012
Tokyo Electron Limited
Teruomi Minami
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
Publication number
20110089137
Publication date
Apr 21, 2011
TOKYO ELECTRON LIMITED
Hiroshi TANAKA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
Publication number
20100319734
Publication date
Dec 23, 2010
TOKYO ELECTRON LIMITED
Teruomi MINAMI
H01 - BASIC ELECTRIC ELEMENTS