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Kazuki Motomatsu
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Koshi City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate liquid processing apparatus
Patent number
11,441,225
Issue date
Sep 13, 2022
Tokyo Electron Limited
Kazuki Motomatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
10,689,762
Issue date
Jun 23, 2020
Tokyo Electron Limited
Akira Murata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
Patent number
10,584,420
Issue date
Mar 10, 2020
Tokyo Electron Limited
Kazuki Motomatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heat exchange system, and substrate processing apparatus having same
Patent number
10,081,033
Issue date
Sep 25, 2018
Tokyo Electron Limited
Satoshi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method and sto...
Patent number
9,822,453
Issue date
Nov 21, 2017
Tokyo Electron Limited
Satoshi Kaneko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLATING APPARATUS
Publication number
20230096305
Publication date
Mar 30, 2023
TOKYO ELECTRON LIMITED
Masato Hamada
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
PLATING METHOD AND PLATING APPARATUS
Publication number
20230042744
Publication date
Feb 9, 2023
TOKYO ELECTRON LIMITED
Masato Hamada
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
Publication number
20220049356
Publication date
Feb 17, 2022
TOKYO ELECTRON LIMITED
Satoshi Kaneko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
Publication number
20210172066
Publication date
Jun 10, 2021
TOKYO ELECTRON LIMITED
Kazuki Motomatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20180010252
Publication date
Jan 11, 2018
TOKYO ELECTRON LIMITED
Akira Murata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
Publication number
20180002811
Publication date
Jan 4, 2018
TOKYO ELECTRON LIMITED
Kazuki Motomatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEAT EXCHANGE SYSTEM, AND SUBSTRATE PROCESSING APPARATUS HAVING SAME
Publication number
20150190838
Publication date
Jul 9, 2015
TOKYO ELECTRON LIMITED
Satoshi Kaneko
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
Publication number
20150159276
Publication date
Jun 11, 2015
TOKYO ELECTRON LIMITED
Satoshi Kaneko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...