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Kazuki NAGAMOTO

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  • Koshi City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 9,362,150
    • Issue date Jun 7, 2016
    • Tokyo Electron Limited
    • Masatoshi Kaneda
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20150303077
    • Publication date Oct 22, 2015
    • TOKYO ELECTRON LIMITED
    • Masatoshi KANEDA
    • H01 - BASIC ELECTRIC ELEMENTS