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Kazuki Narishige
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Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
9,449,838
Issue date
Sep 20, 2016
Tokyo Electron Limited
Kazuto Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
9,412,617
Issue date
Aug 9, 2016
Tokyo Electron Limited
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
9,384,992
Issue date
Jul 5, 2016
Tokyo Electron Limited
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method and computer-readable sto...
Patent number
9,355,861
Issue date
May 31, 2016
Tokyo Electron Limited
Manabu Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
9,337,056
Issue date
May 10, 2016
Tokyo Electron Limited
Rui Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
9,039,913
Issue date
May 26, 2015
Tokyo Electron Limited
Kazuto Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for processing a target object
Patent number
8,759,227
Issue date
Jun 24, 2014
Tokyo Electron Limited
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method and computer-readable sto...
Patent number
8,735,299
Issue date
May 27, 2014
Tokyo Electron Limited
Seiichi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and storage medium
Patent number
8,518,830
Issue date
Aug 27, 2013
Tokyo Electron Limited
Yoshiki Igarashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma etching method
Patent number
8,303,834
Issue date
Nov 6, 2012
Tokyo Electron Limited
Masanobu Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method and storage medium
Patent number
8,071,473
Issue date
Dec 6, 2011
Tokyo Electron Limited
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for manufacturing a semiconductor device, cont...
Patent number
7,622,393
Issue date
Nov 24, 2009
Tokyo Electron Limited
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20150303069
Publication date
Oct 22, 2015
TOKYO ELECTRON LIMITED
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20150235862
Publication date
Aug 20, 2015
TOKYO ELECTRON LIMITED
Rui TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20150228500
Publication date
Aug 13, 2015
TOKYO ELECTRON LIMITED
Kazuto OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND COMPUTER-READABLE STO...
Publication number
20150056816
Publication date
Feb 26, 2015
TOKYO ELECTRON LIMITED
Manabu Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20150037982
Publication date
Feb 5, 2015
TOKYO ELECTRON LIMITED
Kazuto OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR MANUFACTURING APPARATUS AND S...
Publication number
20150011094
Publication date
Jan 8, 2015
TOKYO ELECTRON LIMITED
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING MASK PATTERN AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20130023120
Publication date
Jan 24, 2013
TOKYO ELECTRON LIMITED
Hidetami Yaegashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND STORAGE MEDIUM
Publication number
20120244709
Publication date
Sep 27, 2012
TOKYO ELECTRON LIMITED
Yoshiki IGARASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND COMPUTER-READABLE STO...
Publication number
20120225561
Publication date
Sep 6, 2012
TOKYO ELECTRON LIMITED
Seiichi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PROCESSING A TARGET OBJECT
Publication number
20110059616
Publication date
Mar 10, 2011
TOKYO ELECTRON LIMITED
Kazuki NARISHIGE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA ETCHING METHOD
Publication number
20090242515
Publication date
Oct 1, 2009
TOKYO ELECTRON LIMITED
Masanobu Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device manufacturing method and storage medium
Publication number
20090045165
Publication date
Feb 19, 2009
TOKYO ELECTRON LIMITED
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for manufacturing a semiconductor device, cont...
Publication number
20070105389
Publication date
May 10, 2007
TOKYO ELECTRON LIMITED
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS