Kazuki Ota

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Tochigi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
- Patent number 12,072,638
- Issue date Aug 27, 2024
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
- Patent number 11,835,869
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus, exposure apparatus, and article manufacturing...
- Patent number 11,333,986
- Issue date May 17, 2022
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
- Publication number 20240061350
- Publication date Feb 22, 2024
- Canon Kabushiki Kaisha
- KAZUKI OTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
- Publication number 20230185205
- Publication date Jun 15, 2023
- Canon Kabushiki Kaisha
- KAZUKI OTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20210286275
- Publication date Sep 16, 2021
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY