Kazuki YAMADA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film formation method and film formation device
- Patent number 12,168,825
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Michitaka Aita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern forming method
- Patent number 10,366,888
- Issue date Jul 30, 2019
- Tokyo Electron Limited
- Kazuki Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 9,926,624
- Issue date Mar 27, 2018
- Tokyo Electron Limited
- Kazuki Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PATTERN FORMATION METHOD AND PHOTOSENSITIVE HARD MASK
- Publication number 20230019943
- Publication date Jan 19, 2023
- TOKYO ELECTRON LIMITED
- Hajime NAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20220178031
- Publication date Jun 9, 2022
- Tokyo Electron Limited
- Michitaka AITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING RESIST FILM
- Publication number 20210325780
- Publication date Oct 21, 2021
- TOKYO ELECTRON LIMITED
- Kazuki YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD
- Publication number 20180374695
- Publication date Dec 27, 2018
- TOKYO ELECTRON LIMITED
- Kazuki YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SiC FILM FORMING METHOD AND SiC FILM FORMING APPARATUS
- Publication number 20180076030
- Publication date Mar 15, 2018
- TOKYO ELECTRON LIMITED
- Kazuki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20150368802
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Kazuki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...