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Kazuki Yamamoto
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
Patent number
9,423,299
Issue date
Aug 23, 2016
Canon Kabushiki Kaisha
Kazuki Yamamoto
G01 - MEASURING TESTING
Information
Patent Grant
Wavefront aberration measurement apparatus, exposure apparatus, and...
Patent number
8,400,612
Issue date
Mar 19, 2013
Canon Kabushiki Kaisha
Kazuki Yamamoto
G01 - MEASURING TESTING
Information
Patent Grant
Wavefront aberration measuring apparatus, wavefront aberration meas...
Patent number
8,373,866
Issue date
Feb 12, 2013
Canon Kabushiki Kaisha
Kazuki Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for measuring wavefront aberration
Patent number
8,223,314
Issue date
Jul 17, 2012
Canon Kabushiki Kaisha
Kazuki Yamamoto
G01 - MEASURING TESTING
Information
Patent Grant
Measurement method and apparatus, exposure apparatus
Patent number
7,924,437
Issue date
Apr 12, 2011
Canon Kabushiki Kaisha
Kazuki Yamamoto
G01 - MEASURING TESTING
Information
Patent Grant
Wavefront-aberration measuring device and exposure apparatus includ...
Patent number
7,746,479
Issue date
Jun 29, 2010
Canon Kabushiki Kaisha
Kazuki Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wavefront-aberration measuring device and exposure apparatus includ...
Patent number
7,623,247
Issue date
Nov 24, 2009
Canon Kabushiki Kaisha
Kazuki Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement method and apparatus, exposure apparatus
Patent number
7,609,390
Issue date
Oct 27, 2009
Canon Kabushiki Kaisha
Kazuki Yamamoto
G01 - MEASURING TESTING
Information
Patent Grant
Method of calculating two-dimensional wavefront aberration
Patent number
7,403,291
Issue date
Jul 22, 2008
Canon Kabushiki Kaisha
Kazuki Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
3D SHAPE MEASUREMENT APPARATUS
Publication number
20150130905
Publication date
May 14, 2015
Kazuki Yamamoto
G02 - OPTICS
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20150124232
Publication date
May 7, 2015
Canon Kabushiki Kaisha
Kazuki YAMAMOTO
G01 - MEASURING TESTING
Information
Patent Application
QUANTITATIVE PHASE MEASUREMENT APPARATUS
Publication number
20140162349
Publication date
Jun 12, 2014
Kazuki Yamamoto
G02 - OPTICS
Information
Patent Application
WAVEFRONT ABERRATION MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...
Publication number
20100309448
Publication date
Dec 9, 2010
Canon Kabushiki Kaisha
Kazuki Yamamoto
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MEASURING WAVEFRONT ABERRATION
Publication number
20100026977
Publication date
Feb 4, 2010
Canon Kabushiki Kaisha
Kazuki Yamamoto
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS
Publication number
20090303453
Publication date
Dec 10, 2009
Canon Kabushiki Kaisha
Kazuki Yamamoto
G01 - MEASURING TESTING
Information
Patent Application
WAVEFRONT ABERRATION MEASURING APPARATUS, WAVEFRONT ABERRATION MEAS...
Publication number
20090225328
Publication date
Sep 10, 2009
Canon Kabushiki Kaisha
Kazuki Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
WAVEFRONT-ABERRATION MEASURING DEVICE AND EXPOSURE APPARATUS INCLUD...
Publication number
20090185194
Publication date
Jul 23, 2009
Canon Kabushiki Kaisha
Kazuki Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT METHOD AND APPARATUS, EXPOSURE APPARATUS
Publication number
20070229848
Publication date
Oct 4, 2007
Kazuki Yamamoto
G01 - MEASURING TESTING
Information
Patent Application
Wavefront-aberration measuring device and exposure apparatus includ...
Publication number
20060262323
Publication date
Nov 23, 2006
Canon Kabushiki Kaisha
Kazuki Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of calculating two-dimensional wavefront aberration
Publication number
20060061757
Publication date
Mar 23, 2006
Kazuki Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY