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Kazuma Ideguchi
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Tokyo, JP
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last 30 patents
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Patent Grant
Apparatus for plating and method of plating
Patent number
12,054,841
Issue date
Aug 6, 2024
Ebara Corporation
Kazuma Ideguchi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Short circuit detection method in plating apparatus, control method...
Patent number
11,866,842
Issue date
Jan 9, 2024
Ebara Corporation
Hideki Wakabayashi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR PLATING AND METHOD OF PLATING
Publication number
20230146732
Publication date
May 11, 2023
EBARA CORPORATION
Kazuma IDEGUCHI
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SHORT CIRCUIT DETECTION METHOD IN PLATING APPARATUS, CONTROL METHOD...
Publication number
20220228286
Publication date
Jul 21, 2022
EBARA CORPORATION
Hideki Wakabayashi
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, CONTROLLER FOR SUBSTRATE PROCESSING SY...
Publication number
20220033989
Publication date
Feb 3, 2022
EBARA CORPORATION
Kazuma Ideguchi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR