Kazuma Kubota

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Turbomolecular pump, and particle trap for turbomolecular pump
- Patent number 8,894,355
- Issue date Nov 25, 2014
- Shimadzu Corporation
- Yukiteru Sekita
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Patents Applicationslast 30 patents

Information Patent Application
TURBOMOLECULAR PUMP, AND PARTICLE TRAP FOR TURBOMOLECULAR PUMP
- Publication number 20110293401
- Publication date Dec 1, 2011
- TOKYO ELECTRON LIMITED
- Yukiteru Sekita
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...