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Kazuma Tanii
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam device and charged particle beam adjustment m...
Patent number
11,276,548
Issue date
Mar 15, 2022
HITACHI HIGH-TECH CORPORATION
Hitomi Sakai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing foreign substances in charged particle beam dev...
Patent number
9,368,319
Issue date
Jun 14, 2016
Hitachi High-Technologies Corporation
Kazuma Tanii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
7,514,683
Issue date
Apr 7, 2009
Hitachi High-Technologies Corporation
Kazuma Tanii
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Charged Particle Beam Device and Charged Particle Beam Adjustment M...
Publication number
20210233735
Publication date
Jul 29, 2021
HITACHI HIGH-TECH CORPORATION
Hitomi SAKAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Removing Foreign Substances in Charged Particle Beam Dev...
Publication number
20150279609
Publication date
Oct 1, 2015
Hitachi High-Technologies Corporation
Kazuma Tanii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning electron microscope
Publication number
20070235646
Publication date
Oct 11, 2007
Kazuma Tanii
G01 - MEASURING TESTING