Kazumasa IGARASHI

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Ignition method and plasma processing apparatus
- Patent number 12,080,517
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Takeshi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,923,177
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Keiji Tabuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,781,219
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Kazuo Yabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming method
- Patent number 9,777,366
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming method and film forming apparatus
- Patent number 9,145,604
- Issue date Sep 29, 2015
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming amorphous silicon film
- Patent number 8,895,414
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Akinobu Kakimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming amorphous silicon film
- Patent number 8,802,547
- Issue date Aug 12, 2014
- Tokyo Electron Limited
- Akinobu Kakimoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230395368
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Kazumasa IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230395371
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Kazumasa IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IGNITION METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20220293394
- Publication date Sep 15, 2022
- TOKYO ELECTRON LIMITED
- Takeshi KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220013333
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Keiji TABUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing Apparatus and Processing Method
- Publication number 20200299839
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Kazuo YABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING METHOD
- Publication number 20150270126
- Publication date Sep 24, 2015
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING AMORPHOUS SILICON FILM
- Publication number 20140342534
- Publication date Nov 20, 2014
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20130084693
- Publication date Apr 4, 2013
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND APPARATUS FOR FORMING AMORPHOUS SILICON FILM
- Publication number 20130023110
- Publication date Jan 24, 2013
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS

Kazumasa IGARASHI

Person

Patents Grantslast 30 patents

Ignition method and plasma processing apparatus

Plasma processing apparatus and plasma processing method

Processing apparatus and processing method

Thin film forming method

Thin film forming method and film forming apparatus

Method and apparatus for forming amorphous silicon film

Method and apparatus for forming amorphous silicon film

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

IGNITION METHOD AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Processing Apparatus and Processing Method

THIN FILM FORMING METHOD

METHOD AND APPARATUS FOR FORMING AMORPHOUS SILICON FILM

THIN FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD AND APPARATUS FOR FORMING AMORPHOUS SILICON FILM