Kazumasa Ookuma

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 10,872,779
- Issue date Dec 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Nobuya Miyoshi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20200006079
- Publication date Jan 2, 2020
- Hitachi High-Technologies Corporation
- Nobuya MIYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20120003838
- Publication date Jan 5, 2012
- Hitachi High-Technologies Corporation
- Kazumasa Ookuma
- H01 - BASIC ELECTRIC ELEMENTS