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Kazumitsu Nakamura
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Hsinchu, TW
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last 30 patents
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Patent Grant
Method for fabricating a submicron T-shaped gate
Patent number
5,766,967
Issue date
Jun 16, 1998
Industrial Technology Research Institute
Yeong-Lin Lai
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron beam lithography apparatus and a method thereof
Patent number
5,384,466
Issue date
Jan 24, 1995
Hitachi, Ltd.
Kazumitsu Nakamura
B82 - NANO-TECHNOLOGY