Kazunari Sakata

Person

Machiya 1-Chome, Shiroyama-Machi, Tsukui-Gun, Kanagawa 200-0101, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 10,679,878
- Issue date Jun 9, 2020
- Tokyo Electron Limited
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment system and method therefore
- Patent number 7,819,658
- Issue date Oct 26, 2010
- Tokyo Electron Limited
- Kazunari Sakata
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heat treatment system and a method for cooling a loading chamber
- Patent number 7,059,849
- Issue date Jun 13, 2006
- Tokyo Electron Limited
- Kazunari Sakata
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Processing system for object to be processed
- Patent number 6,729,823
- Issue date May 4, 2004
- Tokyo Electron Limited
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Opening and closing apparatus of an opening and closing lid of a bo...
- Patent number 6,419,482
- Issue date Jul 16, 2002
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus
- Patent number 6,042,372
- Issue date Mar 28, 2000
- Tokyo Electron Limited
- Kazunari Sakata
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical heat treatment apparatus
- Patent number 5,951,282
- Issue date Sep 14, 1999
- Tokyo Electron Limited
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus
- Patent number 5,556,275
- Issue date Sep 17, 1996
- Tokyo Electron Limited
- Kazunari Sakata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical type heat treatment system
- Patent number 5,447,294
- Issue date Sep 5, 1995
- Tokyo Electron Limited
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical heat treating apparatus
- Patent number 5,261,167
- Issue date Nov 16, 1993
- Tokyo Electron Sagami Limited
- Kazunari Sakata
- F26 - DRYING
Information Patent Grant
Clean air apparatus
- Patent number 5,261,935
- Issue date Nov 16, 1993
- Tokyo Electron Sagami Limited
- Katsumi Ishii
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical type heat-treating apparatus
- Patent number 5,226,812
- Issue date Jul 13, 1993
- Tokyo Electron Sagami Kabushiki Kaisha
- Kazunari Sakata
- C30 - CRYSTAL GROWTH
Information Patent Grant
Clean air apparatus
- Patent number 5,219,464
- Issue date Jun 15, 1993
- Tokyo Electron Limited
- Kenichi Yamaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing semiconductors
- Patent number 5,181,819
- Issue date Jan 26, 1993
- Tokyo Electron Sagami Limited
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing Apparatus
- Publication number 20180286716
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Kazunari SAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS
- Publication number 20090301656
- Publication date Dec 10, 2009
- TOKYO ELECTRON LIMITED
- Shinya NISHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment system and method therefore
- Publication number 20070166657
- Publication date Jul 19, 2007
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing system for object to be processed
- Publication number 20020048509
- Publication date Apr 25, 2002
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vertical heat treatment system, method for controlling vertical hea...
- Publication number 20020023458
- Publication date Feb 28, 2002
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS

Kazunari Sakata

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Heat treatment system and method therefore

Heat treatment system and a method for cooling a loading chamber

Processing system for object to be processed

Opening and closing apparatus of an opening and closing lid of a bo...

Heat treatment apparatus

Vertical heat treatment apparatus

Heat treatment apparatus

Vertical type heat treatment system

Vertical heat treating apparatus

Clean air apparatus

Vertical type heat-treating apparatus

Clean air apparatus

Apparatus for processing semiconductors

Patents Applicationslast 30 patents

Substrate Processing Apparatus

MICROWAVE PLASMA PROCESSING APPARATUS

Heat treatment system and method therefore

Processing system for object to be processed

Vertical heat treatment system, method for controlling vertical hea...