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Kazunari Terakawa
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Shiga-ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Inspection apparatus and inspection method for pattern profile, and...
Patent number
7,525,651
Issue date
Apr 28, 2009
International Business Machines Corporation
Mitsuru Uda
G01 - MEASURING TESTING
Information
Patent Grant
Inspection device and inspection method for pattern profile, exposu...
Patent number
7,310,141
Issue date
Dec 18, 2007
International Business Machines Corporation
Mitsuru Uda
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD FOR PATTERN PROFILE, AND...
Publication number
20080192257
Publication date
Aug 14, 2008
International Business Machines Corporation
Mitsuru Uda
G01 - MEASURING TESTING
Information
Patent Application
Inspection device and inspection method for pattern profile, exposu...
Publication number
20050116187
Publication date
Jun 2, 2005
Mitsuru Uda
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for inspecting resist pattern
Publication number
20020113959
Publication date
Aug 22, 2002
International Business Machines Corporation
Mitsuru Uda
G01 - MEASURING TESTING