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Kazunori BESSHO
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Gotenba-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Light source device for producing extreme ultraviolet radiation and...
Patent number
7,626,188
Issue date
Dec 1, 2009
Ushiodenki Kabushiki Kaisha
Takahiro Shirai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet source
Patent number
6,982,421
Issue date
Jan 3, 2006
Ushiodenki Kabushiki Kaisha
Hiroto Sato
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
LIGHT SOURCE DEVICE FOR PRODUCING EXTREME ULTRAVIOLET RADIATION AND...
Publication number
20080048134
Publication date
Feb 28, 2008
Ushiodenki Kabushiki Kaisha
Takahiro SHIRAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Extreme ultraviolet source
Publication number
20050151455
Publication date
Jul 14, 2005
Ushiodenki Kabushiki Kaisha
Hiroto Sato
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR