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Kazunori Fujikawa
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
10,651,029
Issue date
May 12, 2020
SCREEN Holdings Co., Ltd.
Hiroaki Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
9,142,433
Issue date
Sep 22, 2015
SCREEN Holdings Co., Ltd.
Masahiro Miyagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holder
Patent number
5,704,493
Issue date
Jan 6, 1998
Dainippon Screen Mfg. Co., Ltd.
Kazunori Fujikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for rinsing and drying substrate
Patent number
5,331,987
Issue date
Jul 26, 1994
Dainippon Screen Mfg. Co. Ltd.
Eiichiro Hayashi
B08 - CLEANING
Information
Patent Grant
Electrolytic capacitor and method of preparing it
Patent number
4,970,626
Issue date
Nov 13, 1990
Matsushita Electric Industrial Co., Ltd.
Yoshiaki Kakinoki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20170186599
Publication date
Jun 29, 2017
SCREEN Holdings Co., Ltd.
Hiroaki TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20130084709
Publication date
Apr 4, 2013
Masahiro MIYAGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20040060505
Publication date
Apr 1, 2004
Dainippon Screen Mfg. Co., Ltd.
Shuzo Nagami
H01 - BASIC ELECTRIC ELEMENTS