Kazunori Funazaki

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing device and high-frequency generator
- Patent number 10,510,513
- Issue date Dec 17, 2019
- Tokyo Electron Limited
- Kazushi Kaneko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave automatic matcher and plasma processing apparatus
- Patent number 10,109,463
- Issue date Oct 23, 2018
- Tokyo Electron Limited
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and high frequency generator
- Patent number 10,074,524
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Kazushi Kaneko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for inspecting magnetron
- Patent number 9,977,070
- Issue date May 22, 2018
- Tokyo Electron Limited
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, plasma processing method and high freq...
- Patent number 9,418,822
- Issue date Aug 16, 2016
- Tokyo Electron Limited
- Kazushi Kaneko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus and high frequency generator
- Patent number 9,373,483
- Issue date Jun 21, 2016
- Tokyo Electron Limited
- Kazushi Kaneko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus, abnormal oscillation determination met...
- Patent number 9,159,536
- Issue date Oct 13, 2015
- Tokyo Electron Limited
- Kazushi Kaneko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Plasma processing apparatus
- Publication number 20190057843
- Publication date Feb 21, 2019
- TOKYO ELECTRON LIMITED
- Kazushi Kaneko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MICROWAVE AUTOMATIC MATCHER AND PLASMA PROCESSING APPARATUS
- Publication number 20160268101
- Publication date Sep 15, 2016
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING MAGNETRON
- Publication number 20160109502
- Publication date Apr 21, 2016
- TOKYO ELECTRON LIMITED
- Kazushi Kaneko
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS AND HIGH FREQUENCY GENERATOR
- Publication number 20150214011
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND HIGH FREQUENCY GENERATOR
- Publication number 20150047974
- Publication date Feb 19, 2015
- TOKYO ELECTRON LIMITED
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, ABNORMAL OSCILLATION DETERMINATION MET...
- Publication number 20150022086
- Publication date Jan 22, 2015
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING DEVICE AND HIGH-FREQUENCY GENERATOR
- Publication number 20150007940
- Publication date Jan 8, 2015
- TOKYO ELECTRON LIMITED
- Kazushi Kaneko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND HIGH FREQ...
- Publication number 20140225504
- Publication date Aug 14, 2014
- TOKYO ELECTRON LIMITED
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS

Kazunori Funazaki

Person

Patents Grantslast 30 patents

Plasma processing device and high-frequency generator

Microwave automatic matcher and plasma processing apparatus

Plasma processing apparatus and high frequency generator

Method for inspecting magnetron

Plasma processing apparatus, plasma processing method and high freq...

Plasma processing apparatus and high frequency generator

Plasma processing apparatus, abnormal oscillation determination met...

Patents Applicationslast 30 patents

Plasma processing apparatus

MICROWAVE AUTOMATIC MATCHER AND PLASMA PROCESSING APPARATUS

METHOD FOR INSPECTING MAGNETRON

PLASMA PROCESSING APPARATUS AND HIGH FREQUENCY GENERATOR

PLASMA PROCESSING APPARATUS AND HIGH FREQUENCY GENERATOR

PLASMA PROCESSING APPARATUS, ABNORMAL OSCILLATION DETERMINATION MET...

PLASMA PROCESSING DEVICE AND HIGH-FREQUENCY GENERATOR

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND HIGH FREQ...