Kazunori Furukawahara

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Nagaoka-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for pre-baking substrate upstream of process c...
- Patent number 9,349,620
- Issue date May 24, 2016
- ASM IP Holdings B.V.
- Keisuke Kamata
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170309457
- Publication date Oct 26, 2017
- ASM IP HOLDING B.V.
- Kazunori FURUKAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Pre-Baking Substrate Upstream of Process C...
- Publication number 20160013084
- Publication date Jan 14, 2016
- ASM IP HOLDING B.V.
- Keisuke Kamata
- H01 - BASIC ELECTRIC ELEMENTS