Kazunori Imamura

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for detecting foreign particles on a surface of a reticle...
- Patent number 4,999,510
- Issue date Mar 12, 1991
- Nikon Corporation
- Fuminori Hayano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspecting apparatus for determining presence and location of forei...
- Patent number 4,966,457
- Issue date Oct 30, 1990
- Nikon Corporation
- Fuminori Hayano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for examining the surface of a substrate
- Patent number 4,908,517
- Issue date Mar 13, 1990
- Nikon Corporation
- Kazunori Imamura
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus with four light detectors for checking surface of mask wi...
- Patent number 4,889,998
- Issue date Dec 26, 1989
- Nikon Corporation
- Fuminori Hayano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Protective device for photographic masks
- Patent number 4,833,051
- Issue date May 23, 1989
- Nippon Kogaku K.K.
- Kazunori Imamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Conveyor arm apparatus with gap detection
- Patent number 4,803,373
- Issue date Feb 7, 1989
- Nikon Corporation
- Kazunori Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Foreign substance inspecting system including a calibration standard
- Patent number 4,776,693
- Issue date Oct 11, 1988
- Nippon Kogaku K.K.
- Kazunori Imamura
- G01 - MEASURING TESTING
Information Patent Grant
Automatic photomask or reticle washing and cleaning system
- Patent number 4,715,392
- Issue date Dec 29, 1987
- Nippon Kogaku K.K.
- Nobutoshi Abe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 4,690,528
- Issue date Sep 1, 1987
- Nippon Kogaku K.K.
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical apparatus and a photographic mask therefor
- Patent number 4,666,292
- Issue date May 19, 1987
- Nippon Kogaku K.K.
- Kazunori Imamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Foreign substance inspecting apparatus
- Patent number 4,610,541
- Issue date Sep 9, 1986
- Nippon Kogaku K.K.
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for detecting foreign matters on a planar substrate
- Patent number 4,568,835
- Issue date Feb 4, 1986
- Nippon Kogaku K.K.
- Kazunori Imamura
- G01 - MEASURING TESTING
Information Patent Grant
Foreign substance inspecting apparatus
- Patent number 4,468,120
- Issue date Aug 28, 1984
- Nippon Kogaku K.K.
- Akikazu Tanimoto
- G01 - MEASURING TESTING

Kazunori Imamura

Person

Patents Grantslast 30 patents

Apparatus for detecting foreign particles on a surface of a reticle...

Inspecting apparatus for determining presence and location of forei...

Apparatus for examining the surface of a substrate

Apparatus with four light detectors for checking surface of mask wi...

Protective device for photographic masks

Conveyor arm apparatus with gap detection

Foreign substance inspecting system including a calibration standard

Automatic photomask or reticle washing and cleaning system

Projection exposure apparatus

Projection optical apparatus and a photographic mask therefor

Foreign substance inspecting apparatus

Apparatus for detecting foreign matters on a planar substrate

Foreign substance inspecting apparatus