Kazunori Iwamoto

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Moving mechanism and stage system in exposure apparatus
- Patent number 7,346,414
- Issue date Mar 18, 2008
- Canon Kabushiki Kaisha
- Hideo Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moving mechanism and stage system in exposure apparatus
- Patent number 6,990,386
- Issue date Jan 24, 2006
- Canon Kabushiki Kaisha
- Hideo Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus, exposure apparatus, and semiconductor device manuf...
- Patent number 6,965,428
- Issue date Nov 15, 2005
- Canon Kabushiki Kaisha
- Yasuyo Muto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus and exposure apparatus
- Patent number 6,891,599
- Issue date May 10, 2005
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
STAGE APPARATUS WHICH SUPPORTS INTERFEROMETER, STAGE POSITION MEASU...
- Patent number 6,867,849
- Issue date Mar 15, 2005
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure method and apparatus, and device manufacturing me...
- Patent number 6,856,404
- Issue date Feb 15, 2005
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus including interferometer system
- Patent number 6,819,433
- Issue date Nov 16, 2004
- Canon Kabushiki Kaisha
- Ryo Takai
- G01 - MEASURING TESTING
Information Patent Grant
Moving mechanism in exposure apparatus, and exposure apparatus havi...
- Patent number 6,717,653
- Issue date Apr 6, 2004
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage apparatus, exposure apparatus and device manufacturing method
- Patent number 6,469,773
- Issue date Oct 22, 2002
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,133,982
- Issue date Oct 17, 2000
- Canon Kabushiki Kaisha
- Mitsuru Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure method and apparatus
- Patent number 6,069,683
- Issue date May 30, 2000
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus
- Patent number 6,008,885
- Issue date Dec 28, 1999
- Canon Kabushiki Kaisha
- Kazuhiro Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device and exposing apparatus using the same
- Patent number 5,999,589
- Issue date Dec 7, 1999
- Canon Kabushiki Kaisha
- Yuji Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method using the same
- Patent number 5,933,215
- Issue date Aug 3, 1999
- Canon Kabushiki Kaisha
- Mitsuru Inoue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage and exposure apparatus using same
- Patent number 5,909,272
- Issue date Jun 1, 1999
- Canon Kabushiki Kaisha
- Eiji Osanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device and exposing apparatus using the same
- Patent number 5,883,932
- Issue date Mar 16, 1999
- Canon Kabushiki Kaisha
- Yuji Chiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and exposure method and semiconductor...
- Patent number 5,781,277
- Issue date Jul 14, 1998
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mounting method
- Patent number 5,687,947
- Issue date Nov 18, 1997
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device and pattern transfer system using the same
- Patent number 5,684,856
- Issue date Nov 4, 1997
- Canon Kabushiki Kaisha
- Hirohito Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate conveying system
- Patent number 5,640,440
- Issue date Jun 17, 1997
- Canon Kabushiki Kaisha
- Mitsutoshi Kuno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wavelength compensator in a helium ambience
- Patent number 5,483,343
- Issue date Jan 9, 1996
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support device
- Patent number 5,467,720
- Issue date Nov 21, 1995
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer table and exposure apparatus with the same
- Patent number 5,231,291
- Issue date Jul 27, 1993
- Canon Kabushiki Kaisha
- Mitsuaki Amemiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Conveying apparatus and method of controlling the same
- Patent number 5,226,523
- Issue date Jul 13, 1993
- Canon Kabushiki Kaisha
- Eigo Kawakami
- G05 - CONTROLLING REGULATING
Information Patent Grant
Vacuum chuck
- Patent number 5,191,218
- Issue date Mar 2, 1993
- Canon Kabushiki Kaisha
- Tetsuzo Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacture of semiconductor devices
- Patent number 5,168,512
- Issue date Dec 1, 1992
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device
- Patent number 5,160,961
- Issue date Nov 3, 1992
- Canon Kabushiki Kaisha
- Mitsuji Marumo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure system
- Patent number 5,128,975
- Issue date Jul 7, 1992
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Precise feeding mechanism
- Patent number 4,854,444
- Issue date Aug 8, 1989
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Stage apparatus, exposure apparatus, and semiconductor device manuf...
- Publication number 20060017909
- Publication date Jan 26, 2006
- Canon Kabushiki Kaisha
- Yasuyo Muto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Moving mechanism and stage system in exposure apparatus
- Publication number 20050280799
- Publication date Dec 22, 2005
- Canon Kabushiki Kaisha
- Hideo Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, exposure apparatus, and semiconductor device manuf...
- Publication number 20040124594
- Publication date Jul 1, 2004
- Canon Kabushiki Kaisha
- Yasuyo Muto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNING EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING ME...
- Publication number 20030151748
- Publication date Aug 14, 2003
- KAZUNORI IWAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus and exposure apparatus
- Publication number 20030098961
- Publication date May 29, 2003
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Moving mechanism and stage system in exposure apparatus
- Publication number 20030040831
- Publication date Feb 27, 2003
- Canon Kabushiki Kaisha
- Hideo Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure apparatus including interferometer system
- Publication number 20020109850
- Publication date Aug 15, 2002
- Canon Kabushiki Kaisha
- Ryo Takai
- G01 - MEASURING TESTING
Information Patent Application
Moving mechanism in exposure apparatus, and exposure apparatus havi...
- Publication number 20020018195
- Publication date Feb 14, 2002
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus which supports interferometer, stage position measu...
- Publication number 20020008877
- Publication date Jan 24, 2002
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kazunori Iwamoto

Person

Patents Grantslast 30 patents

Moving mechanism and stage system in exposure apparatus

Moving mechanism and stage system in exposure apparatus

Stage apparatus, exposure apparatus, and semiconductor device manuf...

Stage apparatus and exposure apparatus

STAGE APPARATUS WHICH SUPPORTS INTERFEROMETER, STAGE POSITION MEASU...

Scanning exposure method and apparatus, and device manufacturing me...

Exposure apparatus including interferometer system

Moving mechanism in exposure apparatus, and exposure apparatus havi...

Stage apparatus, exposure apparatus and device manufacturing method

Exposure apparatus

Scanning exposure method and apparatus

Scanning exposure apparatus

Substrate holding device and exposing apparatus using the same

Exposure apparatus and device manufacturing method using the same

Stage and exposure apparatus using same

Substrate holding device and exposing apparatus using the same

Projection exposure apparatus and exposure method and semiconductor...

Mounting method

Stage device and pattern transfer system using the same

Substrate conveying system

Wavelength compensator in a helium ambience

Support device

Wafer table and exposure apparatus with the same

Conveying apparatus and method of controlling the same

Vacuum chuck

Method of manufacture of semiconductor devices

Substrate holding device

X-ray exposure system

Precise feeding mechanism

Patents Applicationslast 30 patents

Stage apparatus, exposure apparatus, and semiconductor device manuf...

Moving mechanism and stage system in exposure apparatus

Stage apparatus, exposure apparatus, and semiconductor device manuf...

SCANNING EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING ME...

Stage apparatus and exposure apparatus

Moving mechanism and stage system in exposure apparatus

Exposure apparatus including interferometer system

Moving mechanism in exposure apparatus, and exposure apparatus havi...

Stage apparatus which supports interferometer, stage position measu...