Kazunori Kazama

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,460,949
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Hiroyuki Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control method, control apparatus, and plasma processin...
- Patent number 10,254,774
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Tatsuya Miura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus, program for performing operation an...
- Patent number 8,172,949
- Issue date May 8, 2012
- Tokyo Electron Limited
- Tomoyuki Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, program for performing operation an...
- Patent number 7,756,599
- Issue date Jul 13, 2010
- Tokyo Electron Limited
- Tomoyuki Kudo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210280445
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Wataru NAKAGOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20160111304
- Publication date Apr 21, 2016
- TOKYO ELECTRON LIMITED
- Hiroyuki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROGRAM FOR PERFORMING OPERATION AN...
- Publication number 20100154995
- Publication date Jun 24, 2010
- TOKYO ELECTRON LIMITED
- Tomoyuki Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, program for performing operation an...
- Publication number 20060105548
- Publication date May 18, 2006
- TOKYO ELECTRON LIMITED
- Tomoyuki Kudo
- H01 - BASIC ELECTRIC ELEMENTS