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Kazunori KUSABIRAKI
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Composition for forming liquid immersion upper layer film, and polymer
Patent number
9,926,462
Issue date
Mar 27, 2018
JSR Corporation
Kiyoshi Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Composition for forming liquid immersion upper layer film, and polymer
Patent number
9,540,535
Issue date
Jan 10, 2017
JSR Corporation
Kiyoshi Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Composition, resist pattern-forming method, compound, method for pr...
Patent number
9,268,225
Issue date
Feb 23, 2016
JSR Corporation
Kiyoshi Tanaka
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Liquid immersion lithography upper-layer film-forming composition a...
Patent number
9,261,789
Issue date
Feb 16, 2016
JSR Corporation
Takahiro Hayama
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Composition for forming liquid immersion upper layer film, resist p...
Patent number
9,046,775
Issue date
Jun 2, 2015
JSR Corporation
Shinya Minegishi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Upper layer-forming composition and resist patterning method
Patent number
8,501,389
Issue date
Aug 6, 2013
JSR Corporation
Kazunori Kusabiraki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
UPPER LAYER-FORMING COMPOSITION AND RESIST PATTERNING METHOD
Publication number
20170160637
Publication date
Jun 8, 2017
JSR Corporation
Takahiro Hayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM, AND POLYMER
Publication number
20170073541
Publication date
Mar 16, 2017
JSR Corporation
Kiyoshi TANAKA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
UPPER LAYER-FORMING COMPOSITION AND RESIST PATTERNING METHOD
Publication number
20160109801
Publication date
Apr 21, 2016
JSR Corporation
Takahiro Hayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM, RESIST P...
Publication number
20140377707
Publication date
Dec 25, 2014
JSR Corporation
Shinya MINEGISHI
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
COMPOSITION, RESIST PATTERN-FORMING METHOD, COMPOUND, METHOD FOR PR...
Publication number
20140248563
Publication date
Sep 4, 2014
JSR Corporation
Kiyoshi TANAKA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
METHOD OF FORMING PHOTORESIST PATTERN
Publication number
20140147794
Publication date
May 29, 2014
JSR Corporation
Norihiko SUGIE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM, RESIST P...
Publication number
20140093826
Publication date
Apr 3, 2014
JSR Corporation
Shinya MINEGISHI
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM, AND POLYMER
Publication number
20130217850
Publication date
Aug 22, 2013
JSR Corporation
Kiyoshi TANAKA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM AND METHO...
Publication number
20130084524
Publication date
Apr 4, 2013
JSR Corporation
Takahiro HAYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
UPPER LAYER FILM-FORMING COMPOSITION AND METHOD OF FORMING PHOTORES...
Publication number
20120171613
Publication date
Jul 5, 2012
JSR Corporation
Norihiko SUGIE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
UPPER LAYER-FORMING COMPOSITION AND RESIST PATTERNING METHOD
Publication number
20120021359
Publication date
Jan 26, 2012
JSR Corporation
Takahiro HAYAMA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
UPPER LAYER-FORMING COMPOSITION AND RESIST PATTERNING METHOD
Publication number
20110262859
Publication date
Oct 27, 2011
JSR Corporation
Kazunori KUSABIRAKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY