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Kazunori Sakamoto
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Koshi City, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
10,689,762
Issue date
Jun 23, 2020
Tokyo Electron Limited
Akira Murata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
Patent number
10,584,420
Issue date
Mar 10, 2020
Tokyo Electron Limited
Kazuki Motomatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, substrate processing method and sto...
Patent number
9,822,453
Issue date
Nov 21, 2017
Tokyo Electron Limited
Satoshi Kaneko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
Publication number
20180010252
Publication date
Jan 11, 2018
TOKYO ELECTRON LIMITED
Akira Murata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
Publication number
20180002811
Publication date
Jan 4, 2018
TOKYO ELECTRON LIMITED
Kazuki Motomatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
Publication number
20150159276
Publication date
Jun 11, 2015
TOKYO ELECTRON LIMITED
Satoshi Kaneko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...