Kazunori SHIMIZU

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Nagano, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck and substrate fixing device
- Patent number 11,848,224
- Issue date Dec 19, 2023
- Shinko Electric Industries Co., Ltd.
- Naoyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 10,381,253
- Issue date Aug 13, 2019
- Shinko Electric Industries Co., Ltd.
- Kazuyoshi Miyamoto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
- Publication number 20220301917
- Publication date Sep 22, 2022
- Shinko Electric Industries Co., Ltd.
- Naoyuki Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20180005860
- Publication date Jan 4, 2018
- Shinko Electric Industries Co., LTD.
- Kazuyoshi Miyamoto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20170162416
- Publication date Jun 8, 2017
- Shinko Electric Industries Co., LTD.
- Masakuni Miyazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE AND MANUFACTURING MET...
- Publication number 20130148253
- Publication date Jun 13, 2013
- Shinko Electric Industries Co., Ltd.
- Hidehiro KOMATSU
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER