Kazunori Shinoda

Person

Shiki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer processing method and plasma processing apparatus
- Patent number 12,051,574
- Issue date Jul 30, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 11,915,951
- Issue date Feb 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus
- Patent number 11,557,463
- Issue date Jan 17, 2023
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and plasma processing apparatus
- Patent number 11,515,167
- Issue date Nov 29, 2022
- HITACHI HIGH-TECH CORPORATION
- Sumiko Fujisaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and plasma processing apparatus
- Patent number 11,276,579
- Issue date Mar 15, 2022
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and etching apparatus
- Patent number 11,217,454
- Issue date Jan 4, 2022
- HITACHI HIGH-TECH CORPORATION
- Kazunori Shinoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 10,937,635
- Issue date Mar 2, 2021
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and plasma etching apparatus
- Patent number 10,872,779
- Issue date Dec 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Nobuya Miyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 10,418,254
- Issue date Sep 17, 2019
- Hitachi High-Technologies Corporation
- Kazunori Shinoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 10,325,781
- Issue date Jun 18, 2019
- Hitachi High-Technologies Corporation
- Kazunori Shinoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 10,290,472
- Issue date May 14, 2019
- Hitachi High-Technologies Corporation
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,192,720
- Issue date Jan 29, 2019
- Hitachi High-Technologies Corporation
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical device, modulator module, and method for manufacturing the...
- Patent number 9,110,315
- Issue date Aug 18, 2015
- Oclaro Japan, Inc.
- Akira Nakanishi
- G02 - OPTICS
Information Patent Grant
Optical semiconductor device
- Patent number 8,891,570
- Issue date Nov 18, 2014
- Oclaro Japan, Inc.
- Kouji Nakahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Horizontal-cavity surface-emitting laser
- Patent number 8,855,160
- Issue date Oct 7, 2014
- Hitachi, Ltd.
- Koichiro Adachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical device, optical module, and method for manufacturing optica...
- Patent number 8,774,571
- Issue date Jul 8, 2014
- Oclaro Japan, Inc.
- Kazunori Shinoda
- G02 - OPTICS
Information Patent Grant
Semiconductor laser device
- Patent number 7,738,521
- Issue date Jun 15, 2010
- Opnext Japan, Inc.
- Shin'ichi Nakatsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical integrated device and manufacturing method thereof
- Patent number 7,711,229
- Issue date May 4, 2010
- Opnext Japan, Inc.
- Takeshi Kitatani
- G02 - OPTICS
Information Patent Grant
Semiconductor laser diode
- Patent number 7,636,378
- Issue date Dec 22, 2009
- OpNext Japan, Inc.
- Takeshi Kitatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical cavity surface emitting semiconductor laser device
- Patent number 7,583,714
- Issue date Sep 1, 2009
- OpNext Japan, Inc.
- Kouji Nakahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor optical device and manufacturing method thereof
- Patent number 7,577,319
- Issue date Aug 18, 2009
- OpNext Japan, Inc.
- Shigeki Makino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor laser and optical module
- Patent number 7,502,403
- Issue date Mar 10, 2009
- OpNext Japan, Inc.
- Kazunori Shinoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated optoelectronic device and method of fabricating the same
- Patent number 7,340,142
- Issue date Mar 4, 2008
- OpNext Japan, Inc.
- Kazunori Shinoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distributed feedback semiconductor laser equipment employing a grating
- Patent number 6,989,550
- Issue date Jan 24, 2006
- Hitachi, Ltd.
- Kouji Nakahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optoelectronic waveguiding device and optical modules
- Patent number 6,973,226
- Issue date Dec 6, 2005
- Hitachi, Ltd.
- Hiroshi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical cavity surface emitting laser, optical transmitter-receive...
- Patent number 5,912,913
- Issue date Jun 15, 1999
- Hitachi, Ltd.
- Masahiko Kondow
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Semiconductor laser devices
- Patent number 5,844,931
- Issue date Dec 1, 1998
- Hitachi, Ltd.
- Misuzu Sagawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD
- Publication number 20240297046
- Publication date Sep 5, 2024
- Hitachi High-Tech Corporation
- Kazunori SHINODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20240222138
- Publication date Jul 4, 2024
- HITACHI HIGH-TECH CORPORATION
- Thi-Thuy-Nga NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD
- Publication number 20240047222
- Publication date Feb 8, 2024
- Hitachi High-Tech Corporation
- Kazunori Shinoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20230118576
- Publication date Apr 20, 2023
- Hitachi High-Tech Corporation
- Hiroyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210366721
- Publication date Nov 25, 2021
- Hitachi High-Technologies Corporation
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210358760
- Publication date Nov 18, 2021
- Hitachi High-Technologies Corporation
- Sumiko FUJISAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND ETCHING APPARATUS
- Publication number 20210242030
- Publication date Aug 5, 2021
- Hitachi High-Technologies Corporation
- Kazunori SHINODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20210151298
- Publication date May 20, 2021
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20200328099
- Publication date Oct 15, 2020
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
- Publication number 20200006079
- Publication date Jan 2, 2020
- Hitachi High-Technologies Corporation
- Nobuya MIYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20190237302
- Publication date Aug 1, 2019
- Hitachi High-Technologies Corporation
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20190067032
- Publication date Feb 28, 2019
- Hitachi High-Technologies Corporation
- Kazunori SHINODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180122665
- Publication date May 3, 2018
- Hitachi High-Technologies Corporation
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20180076051
- Publication date Mar 15, 2018
- Hitachi High-Technologies Corporation
- Kazunori SHINODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20170229290
- Publication date Aug 10, 2017
- Hitachi High-Technologies Corporation
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20170018405
- Publication date Jan 19, 2017
- Hitachi High-Technologies Corporation
- Hiroyuki KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE CLEANING APPARATUS AND SAMPLE CLEANING METHOD
- Publication number 20160079055
- Publication date Mar 17, 2016
- Hitachi High-Technologies Corporation
- Naoyuki KOFUJI
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20160079073
- Publication date Mar 17, 2016
- Hitachi High-Technologies Corporation
- Miyako MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS
- Publication number 20150270148
- Publication date Sep 24, 2015
- Hitachi High-Technologies Corporation
- Kazunori Shinoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SEMICONDUCTOR DEVICE
- Publication number 20130208751
- Publication date Aug 15, 2013
- OCLARO JAPAN, INC.
- Kouji NAKAHARA
- B82 - NANO-TECHNOLOGY
Information Patent Application
Semiconductor Optical Element Semiconductor Optical Module and Manu...
- Publication number 20130207140
- Publication date Aug 15, 2013
- Hitachi, Ltd
- Shigeki MAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL DEVICE, OPTICAL MODULE, AND METHOD FOR MANUFACTURING OPTICA...
- Publication number 20130051725
- Publication date Feb 28, 2013
- OCLARO JAPAN, INC.
- Kazunori SHINODA
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR LASER ELEMENT, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20120327965
- Publication date Dec 27, 2012
- Kazunori Shinoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL DEVICE, MODULATOR MODULE, AND METHOD FOR MANUFACTURING THE...
- Publication number 20120314725
- Publication date Dec 13, 2012
- OpNext Japan, Inc.
- Akira NAKANISHI
- G02 - OPTICS
Information Patent Application
SURFACE EMISSION LASER
- Publication number 20120230361
- Publication date Sep 13, 2012
- Koichiro Adachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HORIZONTAL CAVITY SURFACE EMITTING LASER DIODES, VERTICAL ILLUMINAT...
- Publication number 20120183009
- Publication date Jul 19, 2012
- Hitachi, Ltd.
- Koichiro ADACHI
- G02 - OPTICS
Information Patent Application
OPTICAL MODULE
- Publication number 20100142885
- Publication date Jun 10, 2010
- Hitachi, Ltd
- Kazunori SHINODA
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR LASER DIODE
- Publication number 20090129421
- Publication date May 21, 2009
- Takeshi Kitatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL INTEGRATED DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20080317422
- Publication date Dec 25, 2008
- TAKESHI KITATANI
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR LASER AND OPTICAL MODULE
- Publication number 20080266638
- Publication date Oct 30, 2008
- Kazunori Shinoda
- G02 - OPTICS

Kazunori Shinoda

Person

Patents Grantslast 30 patents

Wafer processing method and plasma processing apparatus

Plasma processing method

Vacuum processing apparatus

Plasma etching method and plasma processing apparatus

Substrate processing method and plasma processing apparatus

Plasma processing method and etching apparatus

Vacuum processing apparatus

Plasma etching method and plasma etching apparatus

Etching method and etching apparatus

Etching method and etching apparatus

Vacuum processing apparatus

Plasma processing apparatus

Optical device, modulator module, and method for manufacturing the...

Optical semiconductor device

Horizontal-cavity surface-emitting laser

Optical device, optical module, and method for manufacturing optica...

Semiconductor laser device

Optical integrated device and manufacturing method thereof

Semiconductor laser diode

Vertical cavity surface emitting semiconductor laser device

Semiconductor optical device and manufacturing method thereof

Semiconductor laser and optical module

Integrated optoelectronic device and method of fabricating the same

Distributed feedback semiconductor laser equipment employing a grating

Optoelectronic waveguiding device and optical modules

Vertical cavity surface emitting laser, optical transmitter-receive...

Semiconductor laser devices

Patents Applicationslast 30 patents

ETCHING METHOD

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD

WAFER PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

PLASMA ETCHING METHOD AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING METHOD AND ETCHING APPARATUS

VACUUM PROCESSING APPARATUS

PLASMA PROCESSING METHOD

PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS

VACUUM PROCESSING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

PLASMA PROCESSING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

VACUUM PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

SAMPLE CLEANING APPARATUS AND SAMPLE CLEANING METHOD

PLASMA PROCESSING METHOD

ETCHING APPARATUS

OPTICAL SEMICONDUCTOR DEVICE

Semiconductor Optical Element Semiconductor Optical Module and Manu...

OPTICAL DEVICE, OPTICAL MODULE, AND METHOD FOR MANUFACTURING OPTICA...

SEMICONDUCTOR LASER ELEMENT, METHOD OF MANUFACTURING SEMICONDUCTOR...

OPTICAL DEVICE, MODULATOR MODULE, AND METHOD FOR MANUFACTURING THE...

SURFACE EMISSION LASER

HORIZONTAL CAVITY SURFACE EMITTING LASER DIODES, VERTICAL ILLUMINAT...

OPTICAL MODULE

SEMICONDUCTOR LASER DIODE

OPTICAL INTEGRATED DEVICE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR LASER AND OPTICAL MODULE