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Kazunori Tsubuku
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Hitachi-shi, JP
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last 30 patents
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Patent Grant
Apparatus for manufacturing semiconductor substrates
Patent number
7,485,874
Issue date
Feb 3, 2009
Sumco Corporation
Seiichi Nakamura
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Apparatus for manufacturing semiconductor substrates
Publication number
20070114458
Publication date
May 24, 2007
Seiichi Nakamura
H01 - BASIC ELECTRIC ELEMENTS