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Kazuo Arai
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Tsukuba-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
6,812,102
Issue date
Nov 2, 2004
National Institute of Advanced Industrial Science and Technology
Kenji Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor devices
Patent number
6,764,963
Issue date
Jul 20, 2004
National Institute of Advanced Industrial Science and Technology
Kenji Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
SiC semiconductor device
Patent number
6,759,684
Issue date
Jul 6, 2004
National Institute of Advanced Industrial Science and Technology
Kenji Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE
Publication number
20090289355
Publication date
Nov 26, 2009
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Norihiko Kiritani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device manufacturing method
Publication number
20040087093
Publication date
May 6, 2004
Kenji Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Manufacturing method of semiconductor devices
Publication number
20030013266
Publication date
Jan 16, 2003
National Inst. of Advanced Ind. Science and Tech.
Kenji Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SiC semicoductor device
Publication number
20020047125
Publication date
Apr 25, 2002
Nat ' l Inst. of Advanced industrial and Technology
Kenji Fukuda
H01 - BASIC ELECTRIC ELEMENTS