Kazuo Eguchi

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Yamanashi-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and devices for detecting the end point of plasma process
- Patent number 5,728,253
- Issue date Mar 17, 1998
- Tokyo Electron Limited
- Susumu Saito
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma process apparatus
- Patent number 5,717,294
- Issue date Feb 10, 1998
- Kabushiki Kaisha Toshiba
- Itsuko Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for detecting the end point of plasma process
- Patent number 5,565,114
- Issue date Oct 15, 1996
- Tokyo Electron Limited
- Susumu Saito
- G01 - MEASURING TESTING