Kazuo Inuta

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Yokaichi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for processing wafers and the like
- Patent number 4,750,505
- Issue date Jun 14, 1988
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo Inuta
- F26 - DRYING
Information Patent Grant
Rotary board treating apparatus
- Patent number 4,531,474
- Issue date Jul 30, 1985
- Dainippon Screen Manufacturing Co., Ltd.
- Kazuo Inuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...