Kazuo Kasai

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Amagasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for etching of a silicon substrate and etching apparatus
- Patent number 7,220,678
- Issue date May 22, 2007
- Sumitomo Precision Products Co., Ltd.
- Yoshiyuki Nozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clad fine wire electrode-type activated species-generating apparatus
- Patent number 5,413,769
- Issue date May 9, 1995
- Sumitomo Precision Products Co., Ltd.
- Sachiko Okazaki
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
Silicon Substrate Etching Method
- Publication number 20070212888
- Publication date Sep 13, 2007
- Sumitomo Precision Products Co., Ltd.
- Kazuo Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for etching of a silicon substrate and etching apparatus
- Publication number 20050130436
- Publication date Jun 16, 2005
- Sumitomo Precision Products Co., Ltd.
- Yoshiyuki Nozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silicon substrate etching method and etching apparatus
- Publication number 20040180544
- Publication date Sep 16, 2004
- Sumitomo Precision Products Co., Ltd.
- Kazuo Kasai
- H01 - BASIC ELECTRIC ELEMENTS