Kazuo Kato

Person

  • Naka, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Charged particle beam apparatus

    • Patent number 8,071,961
    • Issue date Dec 6, 2011
    • Hitachi High-Technologies Corporation
    • Hiroaki Mito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Charged particle beam apparatus

    • Patent number 7,601,974
    • Issue date Oct 13, 2009
    • Hitachi High-Technologies Corporation
    • Hiroaki Mito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Charged particle beam apparatus

    • Patent number 7,247,864
    • Issue date Jul 24, 2007
    • Hitachi High-Technologies Corporation
    • Hiroaki Mito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Charged particle beam apparatus

    • Patent number 7,205,541
    • Issue date Apr 17, 2007
    • Hitachi High-Technologies Corporation
    • Hiroaki Mito
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Charged particle beam apparatus

    • Publication number 20100258739
    • Publication date Oct 14, 2010
    • Hitachi High-Technologies Corporation
    • Hiroaki Mito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Charged particle beam apparatus

    • Publication number 20070187601
    • Publication date Aug 16, 2007
    • Hiroaki Mito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CHARGED PARTICLE BEAM APPARATUS

    • Publication number 20070120068
    • Publication date May 31, 2007
    • Hiroaki Mito
    • H01 - BASIC ELECTRIC ELEMENTS