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Kazuo Kimata
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Ichinomiya-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Thin substrate transferring apparatus
Patent number
6,234,738
Issue date
May 22, 2001
MECS Corporation
Kazuo Kimata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carrier system for silicon wafer
Patent number
4,778,331
Issue date
Oct 18, 1988
MECS Corporation
Kazuo Kimata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carrier system for clean room
Patent number
4,735,548
Issue date
Apr 5, 1988
MECS Corporation
Kazuo Kimata
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Seal structure for transfer robot
Publication number
20050115351
Publication date
Jun 2, 2005
AITEC CORPORATION
Kazuo Kimata
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Arms of scalar robot
Publication number
20020148320
Publication date
Oct 17, 2002
AITEC Corporation
Kazuo Kimata
H01 - BASIC ELECTRIC ELEMENTS