Kazuo Mamada

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Annaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat treatment jig for semiconductor wafers and a method for treati...
- Patent number 5,759,426
- Issue date Jun 2, 1998
- Shin-Etsu Handotai Co., Ltd.
- Norihiro Kobayashi
- C30 - CRYSTAL GROWTH